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Polarized low-coherence interferometer based on a matrix CCD and birefringence crystal with a two-dimensional angle
Optics Express
|August 10, 2017
Summary
A novel polarized low-coherence interferometer (PLCI) expands measurement range to 301 μm with high resolution (2.52 nm) and low deviation (± 7 nm) for precise displacement measurement.
Area of Science:
- Optics and Photonics
- Metrology and Measurement Science
Background:
- Traditional polarized low-coherence interferometry (PLCI) faces limitations in measurement range.
- Accurate displacement measurement is crucial in various scientific and industrial applications.
Purpose of the Study:
- To propose and demonstrate an electronically scanned PLCI system with an expanded measurement range.
- To enhance the precision and resolution of displacement measurements.
Main Methods:
- Development of an electronically scanned PLCI using a matrix charge-coupled-device and a birefringence crystal.
- Application of the system to displacement measurement using a fiber end face and glass surface sensing interferometer.
- Capture and demodulation of two-dimensional interference fringes using advanced algorithms.
Main Results:
- The proposed PLCI system achieved a significantly expanded measurement range of approximately 301 μm.
- Low measurement deviation within ± 7 nm was maintained.
- High resolution of 2.52 nm was demonstrated.
Conclusions:
- The electronically scanned PLCI offers superior performance compared to traditional systems.
- The enhanced system provides a robust solution for high-precision, long-range displacement measurements.
