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Monolithically-integrated distributed feedback laser compatible with CMOS processing.

Emir Salih Magden, Nanxi Li, Purnawirman

    Optics Express
    |August 10, 2017
    PubMed
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    Researchers developed a low-temperature CMOS-compatible laser using rare-earth-doped aluminum oxide. This integrated photonic device achieves high performance, paving the way for advanced silicon microphotonic systems.

    Area of Science:

    • Photonics
    • Materials Science
    • Integrated Optics

    Background:

    • Monolithic integration of lasers and active devices is crucial for advanced silicon microphotonic systems.
    • Previous methods for fabricating laser gain media require high temperatures, limiting CMOS compatibility.
    • Developing low-temperature deposition processes for high-performance gain media is essential for scalable photonic integration.

    Purpose of the Study:

    • To demonstrate an optically-pumped, integrated distributed feedback laser using a CMOS-compatible process.
    • To develop a low-temperature deposition method for a rare-earth-doped aluminum oxide gain medium.
    • To enable monolithic integration of lasers with modulators and detectors in silicon photonics.

    Main Methods:

    • Fabrication of a distributed feedback laser using a CMOS-compatible process.

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  • Deposition of a rare-earth-doped aluminum oxide gain medium via substrate-bias-assisted reactive sputtering at 250 °C.
  • Characterization of laser performance, including pump threshold and slope efficiency.

    • Main Results:

    • Demonstrated an optically-pumped, integrated distributed feedback laser with a pump threshold of 24.9 mW and a slope efficiency of 1.3 % at 1552.98 nm.
    • Achieved optical quality films with 0.1 dB/cm background loss at a low deposition temperature of 250 °C.
    • Laser performance comparable to devices fabricated at much higher temperatures (> 550 °C).

    Conclusions:

    • The developed low-temperature deposition process is fully compatible with back-end-of-line CMOS fabrication.
    • This work represents a significant advancement towards the monolithic integration of amplifiers and lasers in silicon microphotonic systems.
    • The integrated laser technology holds promise for next-generation optical communication and computing.