Inverse-designed ultra-compact star-crossings based on PhC-like subwavelength structures for optical intercross connect

With the development of highly densified photonic integrated circuits, the optical cross nodes number exhibits dramatically increasing. Not only efficient but also ultra-compact waveguide crossings are required to materialize the full potential of silicon photonics for on-chip optical intercross connect. In this work, we proposed several inverse-designed 4 × 4, 5 × 5 and 6 × 6 star-crossings based on the photonic-crystal-like (PhC-like) subwavelength structures, which have ultra-high port density of about 7.1 μm²/port, 5.83 μm²/port and 7.3 μm²/port respectively. Moreover, the star-crossings are practically fabricated and experimentally characterized. The average measured insertion losses (ILs) are less than 0.75, 0.9 dB and 1.5 dB, while the crosstalks are sub-22.5 dB, -20 dB and -18 dB for other output ports over 60 nm bandwidth centered at 1550 nm wavelength.