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Published on: May 13, 2020
Effects of Electrodes on the Switching Behavior of Strontium Titanate Nickelate Resistive Random Access Memory
Ke-Jing Lee1, Li-Wen Wang2, Te-Kung Chiang3
1Department of Electrical Engineering, Institute of Microelectronics, Advanced Optoelectronic Technology Center, National Cheng-Kung University, Tainan 701, Taiwan. hugh2224@gmail.com.
Abstract:
Strontium titanate nickelate (STN) thin films on indium tin oxide (ITO)/glass substrate were synthesized using the sol-gel method for resistive random access memory (RRAM) applications. Aluminum (Al), titanium (Ti), tungsten (W), gold (Au) and platinum (Pt) were used as top electrodes in the STN-based RRAM to probe the switching behavior. The bipolar resistive switching behavior of the set and reset voltages is in opposite bias in the Al/STN/ITO and Pt/STN/ITO RRAMs, which can be partly ascribed to the different work functions of top electrodes in the ITO. Analyses of the fitting results and temperature-dependent performances showed that the Al/STN/ITO switching was mainly attributed to the absorption/release of oxygen-based functional groups, whereas the Pt/STN/ITO switching can be associated with the diffusion of metal electrode ions. The Al/STN/ITO RRAM demonstrated a high resistance ratio of >10⁶ between the high-resistance state (HRS) and the low-resistance state (LRS), as well as a retention ability of >10⁵ s. Furthermore, the Pt/STN/ITO RRAM displayed a HRS/LRS resistance ratio of >10³ and a retention ability of >10⁵ s.
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