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The Microfluidic Probe: Operation and Use for Localized Surface Processing
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SU-8 free-standing microfluidic probes.

A A Kim, K Kustanovich, D Baratian1

  • 1Department of Chemistry and Chemical Engineering, Chalmers University of Technology, Göteborg 412 96, Sweden.

Biomicrofluidics
|August 12, 2017
PubMed
Summary
This summary is machine-generated.

We developed a novel fabrication process for free-standing SU-8 microfluidic probes using thermal release tape. This method enables versatile, batch production of devices with integrated functionalities for applications like impedance sensing.

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Area of Science:

  • Microfabrication
  • Materials Science
  • Biotechnology

Background:

  • SU-8 photoresist is widely used for microfabrication due to its excellent properties.
  • Existing methods for releasing SU-8 microstructures can be complex and limit scalability.
  • There is a need for robust and versatile fabrication processes for free-standing microfluidic devices.

Purpose of the Study:

  • To present a novel, dry release process for fabricating free-standing SU-8 microfluidic probes.
  • To demonstrate the versatility of the fabrication process for various applications, including impedance sensing.
  • To enable convenient batch production of microfluidic devices with precise tip geometry.

Main Methods:

  • Utilized thermal release tape for a dry, mechanical release of SU-8 micro-devices from a sacrificial layer.
  • Developed two liquid interface designs for characterizing the SU-8 probes: integrated wells and external reservoirs.
  • Functionalized SU-8 probes with metal thin-film electrodes for impedance sensing and developed an associated electronic interface.
  • Investigated photolithography for creating perforations in SU-8 devices for diffusion-based solution sampling.

Main Results:

  • Successfully fabricated free-standing SU-8 microfluidic probes with a dry release mechanism.
  • Demonstrated the adaptability of the process for creating functionalized probes for impedance sensing.
  • Developed versatile interface schemes for liquid handling and electronic measurements.
  • Showcased the potential for batch production of microfluidic devices with controlled tip geometry.

Conclusions:

  • The presented SU-8 fabrication process offers a convenient and scalable method for producing versatile free-standing microfluidic devices.
  • The dry release technique simplifies device fabrication and enhances compatibility with various applications.
  • The developed process facilitates the integration of sensing functionalities and precise control over device geometry.