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Carbon nanofiber high frequency nanomechanical resonators
Jaesung Lee1, Anupama B Kaul, Philip X-L Feng
1Department of Electrical Engineering & Computer Science, Case School of Engineering, Case Western Reserve University, Cleveland, OH 44106, USA. philip.feng@case.edu.
Nanoscale
|August 15, 2017
Summary
Carbon nanofibers (CNFs) show promise for high-frequency nanomechanical resonators. These CNF resonators, fabricated via plasma-enhanced chemical vapor deposition (PECVD), demonstrate significant Q factors and frequency shifts with mass loading.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- High-frequency nanomechanical resonators are crucial for various sensing and electronic applications.
- Carbon nanofibers (CNFs) offer unique mechanical and electrical properties suitable for resonator development.
Purpose of the Study:
- To investigate carbon nanofibers (CNFs) synthesized by plasma-enhanced chemical vapor deposition (PECVD) as novel building blocks for high-frequency nanomechanical resonators.
- To characterize the performance of CNF-based resonators, including their Q factors and response to mass loading.
Main Methods:
- Fabrication of cantilever-structured CNF resonators using PECVD.
- Measurement of undriven thermomechanical motions and photothermally driven resonances (3-10 MHz).
- Investigation of resonator characteristics post-platinum deposition and electron beam exposure.
- Material characterization using X-ray electron dispersive spectroscopy (XEDS) with spatial element mapping.
Main Results:
- CNF resonators exhibited quality (Q) factors ranging from approximately 140 to 350 in moderate vacuum at room temperature.
- Resonance frequency shifts were clearly observed due to mass loading (platinum deposition) and electron beam exposure.
- XEDS analysis provided insights into the CNF structure and growth mechanisms.
Conclusions:
- Vertically oriented CNFs grown by PECVD are viable building blocks for high-frequency nanomechanical resonators.
- The observed Q factors and sensitivity to mass loading highlight the potential of CNF resonators for sensing applications.
- Understanding the CNF growth mechanism is key to optimizing resonator performance.
