Slot Antenna Integrated Re-Entrant Resonator Based Wireless Pressure Sensor for High-Temperature Applications

Area of Science:

• Sensor Technology
• Microwave Engineering
• Materials Science

Background:

• High-temperature environments pose challenges for traditional pressure sensing.
• Wireless passive sensing is desirable for remote and harsh conditions.
• Microwave backscattering offers a non-contact sensing modality.

Purpose of the Study:

• To develop a highly sensitive, wireless passive pressure sensor for high-temperature applications.
• To optimize a re-entrant resonator structure for microwave sensing.
• To improve signal-to-noise ratio in cluttered environments.

Main Methods:

• Theoretical analysis and software simulation of re-entrant resonator.
• Fabrication using micro-machining and high-temperature co-fired ceramic (HTCC) processes.
• Development of techniques for background clutter suppression and weak signal detection.

Main Results:

• Successful fabrication of a pressure sensor using HTCC technology.
• Demonstrated functionality for gas pressure loading between 40 and 120 kPa.
• Operation confirmed in temperatures ranging from 24 °C to 800 °C.
• Achieved a maximum pressure sensitivity of 73.125 kHz/kPa at a resonant frequency of 2.1065 GHz.

Conclusions:

• The developed sensor is effective for wireless passive pressure sensing in high-temperature environments.
• The proposed techniques enhance signal detection in challenging conditions.
• The sensor exhibits excellent performance and sensitivity within the tested parameters.