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Improving microstructural quantification in FIB/SEM nanotomography.

Joshua A Taillon¹, Christopher Pellegrinelli², Yi-Lin Huang²

¹University of Maryland, Materials Science and Engineering, College Park, MD 20742, United States.

Ultramicroscopy

|August 26, 2017

Summary

This summary is machine-generated.

Focused Ion Beam/Scanning Electron Microscopy nanotomography (FIB-nt) improves 3D microstructure analysis. New techniques enhance data quality and enable advanced quantification for materials engineering applications.

Keywords:

3D reconstruction Focused ion beam Microstructure quantification Scanning electron microscopy Tortuosity Triple phase boundaries

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Area of Science:

Materials Science
Nanotechnology
Microscopy

Background:

Three-dimensional microstructure dictates material performance and device engineering.
Focused Ion Beam/Scanning Electron Microscopy nanotomography (FIB-nt) is key for subsurface feature analysis.
Advanced FIB-nt analysis remains challenging in data acquisition and post-processing.

Purpose of the Study:

To present techniques for improving FIB-nt data quality.
To introduce methods for advanced microstructural quantification.
To demonstrate practical implementation using a solid oxide fuel cell cathode.

Main Methods:

Data acquisition optimization for FIB-nt.
Post-processing strategies for enhanced nanotomographic analysis.
Application of techniques to a solid oxide fuel cell cathode.

Main Results:

Improved quality of acquired 3D microstructural data.
Successful implementation of advanced microstructural quantifications.
Demonstrated adaptability of methodologies across material systems.

Conclusions:

Developed techniques enhance the utility of FIB-nt for materials analysis.
Methodologies are applicable beyond the studied solid oxide fuel cell cathode.
Advanced microstructural quantification is made more accessible through these methods.