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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Dispersion engineering and frequency comb generation in thin silicon nitride concentric microresonators.
Sangsik Kim1,2,3,4, Kyunghun Han1,2, Cong Wang1
1School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, 47907, USA.
Nature Communications
|August 31, 2017
Summary
Researchers developed a novel concentric racetrack resonator to generate Kerr frequency combs. This design overcomes limitations of anomalous dispersion, enabling broader applications in silicon nitride microresonators.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
Background:
- Kerr nonlinearity-based frequency combs and solitons are typically generated from on-chip microresonators.
- Initiation of these combs requires anomalous dispersion, which imposes significant limitations on material choice, film thickness, spectral range, and fabrication.
Purpose of the Study:
- To overcome the limitations associated with anomalous dispersion in microresonator-based frequency comb generation.
- To engineer resonator dispersion to be anomalous over a moderately broad bandwidth using a novel resonator design.
Main Methods:
- Utilized a concentric racetrack-shaped resonator design.
- Engineered anomalous dispersion in a 300 nm thick silicon nitride film, a material previously associated with normal dispersion.
- Employed a mode-selective, tapered coupling scheme.
Main Results:
- Demonstrated anomalous dispersion in silicon nitride microresonators, overcoming previous material and fabrication constraints.
- Successfully generated coherent mode-locked frequency combs.
- Showcased the ability to engineer anomalous dispersion for resonators at almost any wavelength.
Conclusions:
- The concentric racetrack resonator design effectively lifts constraints on material choice and fabrication for frequency comb generation.
- This approach offers material and process compatibility with semiconductor manufacturing.
- Enables broader applicability of on-chip frequency combs by overcoming anomalous dispersion limitations.

