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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Basant Chitara1, Assaf Ya'akobovitz1
1Department of Mechanical Engineering, Faculty of Engineering Sciences, Ben-Gurion University of the Negev, Israel.
Gallium telluride (GaTe) nanodrums were characterized for their elastic properties and electromechanical resonance. This research enables new GaTe-based nanoelectromechanical devices for sensing and actuation.
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