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Power measurements and coupler optimization in inductive discharges.

V A Godyak1, B M Alexandrovich2

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Accurately measuring absorbed power in radio frequency (RF) plasma sources is crucial. This study presents a method to determine plasma absorbed power and coupler losses, proposing a coil-splitting technique for improved efficiency and reduced plasma potential.

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Area of Science:

  • Plasma Physics
  • Radio Frequency (RF) Discharges
  • Plasma Source Engineering

Background:

  • Accurate power measurement is vital for understanding and controlling plasma processes.
  • Existing methods often misrepresent absorbed power due to losses in RF components.
  • Characterizing power delivery in inductively coupled plasmas (ICPs) requires accounting for coupler and matcher network losses.

Purpose of the Study:

  • To develop a method for accurately determining the power absorbed by plasma in ICPs.
  • To quantify power losses within the coupler and matcher network.
  • To propose and evaluate practical coupler configurations for enhanced efficiency and reduced RF plasma potential.

Main Methods:

  • Detailed analysis of power flow from the RF source to the plasma.
  • Development of a technique to differentiate between source power, coupler-terminated power, and plasma-absorbed power.
  • Implementation and testing of a novel coupler configuration involving coil splitting and a resonating capacitor.

Main Results:

  • Experimental validation of a method to accurately measure plasma absorbed power and coupler losses.
  • Demonstration of significantly improved coupler efficiency using the proposed coil-splitting method.
  • Substantial reduction in RF plasma potential achieved with the modified coupler design.

Conclusions:

  • The proposed method provides a more accurate assessment of power coupling in ICPs.
  • Coil splitting with a resonating capacitor offers a practical and effective solution for optimizing RF coupler performance.
  • Minimizing coupler losses and RF plasma potential is achievable, leading to more efficient plasma generation.