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Updated: Feb 23, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Digital holographic high-speed 3D imaging for the vibrometry of fast-occurring phenomena
Takashi Kakue1, Yutaka Endo2, Takashi Nishitsuji3
1Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan. t-kakue@chiba-u.jp.
Abstract:
Digital holography allows production of high-speed three-dimensional images at rates over 100,000 frames per second; however, simultaneously obtaining suitable performance and levels of accuracy using digital holography is difficult. This problem prevents high-speed three-dimensional imaging from being used for vibrometry. In this paper, we propose and test a digital holography method that can produce vibration measurements. The method is based on single-shot phase-shifting interferometry. Herein, we imaged the surface of a loudspeaker diaphragm and measured its displacement due to the vibrations produced by a frequency sweep signal. We then analyzed the frequency of the experimental data and confirmed that the frequency spectra inferred from the reconstructed images agreed well with the spectra produced by the sound recorded by a microphone. This method can be used for measuring vibrations with three-dimensional imaging for loudspeakers, microelectromechanical systems, surface acoustic wave filters, and biological tissues and organs.
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