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Updated: Feb 23, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Micropatternable Double-Faced ZnO Nanoflowers for Flexible Gas Sensor
Jong-Woo Kim1, Yoann Porte1, Kyung Yong Ko1
1Department of Materials Science and Engineering and ‡School of Electrical and Electronic Engineering, Yonsei University , 50 Yonsei-ro, Soedaemun-gu, Seoul 03722, Republic of Korea.
Abstract:
Micropatternable double-faced (DF) zinc oxide (ZnO) nanoflowers (NFs) for flexible gas sensors have been successfully fabricated on a polyimide (PI) substrate with single-walled carbon nanotubes (SWCNTs) as electrode. The fabricated sensor comprises ZnO nanoshells laid out on a PI substrate at regular intervals, on which ZnO nanorods (NRs) were grown in- and outside the shells to maximize the surface area and form a connected network. This three-dimensional network structure possesses multiple gas diffusion channels and the micropatterned island structure allows the stability of the flexible devices to be enhanced by dispersing the strain into the empty spaces of the substrate. Moreover, the micropatterning technique on a flexible substrate enables highly integrated nanodevices to be fabricated. The SWCNTs were chosen as the electrode for their flexibility and the Schottky barrier they form with ZnO, improving the sensing performance. The devices exhibited high selectivity toward NO2 as well as outstanding sensing characteristics with a stable response of 218.1, fast rising and decay times of 25.0 and 14.1 s, respectively, and percent recovery greater than 98% upon NO2 exposure. The superior sensing properties arose from a combination of high surface area, numerous active junction points, donor point defects in the ZnO NRs, and the use of the SWCNT electrode. Furthermore, the DF-ZnO NF gas sensor showed sustainable mechanical stability. Despite the physical degradation observed, the devices still demonstrated outstanding sensing characteristics after 10 000 bending cycles at a curvature radius of 5 mm.
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