Study of the origin of bending induced by bimetallic effect on microcantilever

Daniel Ramos1, Johann Mertens1, Montserrat Calleja1

  • 1BioNanoMechanics Lab, National Centre for Microelectronics, IMM-CNM, CSIC Isaac Newton 8 (PTM), Tres Cantos 28760, Madrid, Spain.

Sensors (Basel, Switzerland)
|September 15, 2017
PubMed

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