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SU-8 Guiding Layer for Love Wave Devices.

Paul Roach1, Shaun Atherton2, Nicola Doy2

  • 1School of Science and Technology, Nottingham Trent University, Clifton Campus, Nottingham. NG11 8NS. UK. paul.roach@ntu.ac.uk.

Sensors (Basel, Switzerland)
|September 15, 2017
PubMed
Summary
This summary is machine-generated.

This study demonstrates SU-8 photoresist as a novel guiding layer for Love wave sensors. This integration enables advanced microfluidic and MEMS device fabrication with enhanced sensing capabilities.

Keywords:
Love waveSH-SAWSU-8SU-8 guiding layer

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Microfabrication

Background:

  • SU-8 photoresist is crucial for microfluidics and MEMS fabrication, enabling high aspect ratio structures.
  • Love wave sensors offer high sensitivity for various detection applications.

Purpose of the Study:

  • To investigate the use of SU-8 as a guiding layer in Love wave sensors.
  • To explore the integration of guiding layers with flow cells during fabrication.
  • To characterize the performance of SU-8 based Love wave sensors.

Main Methods:

  • Fabrication of devices on ST-cut quartz substrates with single-single finger design.
  • Excitation of a surface skimming bulk wave (SSBW) at 97.4 MHz.
  • Spin coating of SU-8 layers to vary guiding layer thickness and spectral analysis.
  • Investigation of insertion loss, frequency dependence, and mass loading sensitivity using gold deposition.
  • Demonstration of liquid sensing with water-glycerol mixtures and protein adsorption/removal using albumin and fibrinogen.

Main Results:

  • A decrease in frequency was observed with increasing SU-8 guiding layer thickness.
  • Insertion loss and frequency dependence were characterized for the first Love wave mode.
  • The devices exhibited mass loading sensitivity upon gold deposition.
  • Successful demonstration of liquid sensing, including density-viscosity measurements and protein interaction analysis.

Conclusions:

  • SU-8 is a viable and effective guiding layer material for Love wave sensors.
  • The integration of SU-8 guiding layers with flow cells is feasible for lab-on-a-chip applications.
  • SU-8 based Love wave sensors show potential for label-free detection of biomolecules and liquid properties.