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Quantitative Accelerated Life Testing of MEMS Accelerometers.

Marius Bâzu1, Lucian Gălăţeanu2, Virgil Emil Ilian3

  • 1National Institute for R&D in Microtechnologies -IMT-Bucharest, 126A, Erou Iancu Nicolae street, 077190, Bucharest, Romania. mbazu@imt.ro.

Sensors (Basel, Switzerland)
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Summary

Quantitative Accelerated Life Testing (QALT) effectively assesses Micro Electro Mechanical Systems (MEMS) reliability. This study demonstrates MEMS accelerometers exhibit excellent reliability, with failure rates below 10^-7 per hour under combined thermal and mechanical stress.

Keywords:
MEMSaccelerometersreliabilitytiltingvibration.

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Micro Electro Mechanical Systems (MEMS) require robust reliability assessments for critical applications.
  • Quantitative Accelerated Life Testing (QALT) provides a framework for evaluating device longevity.
  • MEMS accelerometers are increasingly used in automotive, aerospace, and security systems, necessitating high reliability.

Purpose of the Study:

  • To present a procedure for Quantitative Accelerated Life Testing (QALT) of MEMS.
  • To assess the reliability of a batch of MEMS accelerometers using an application-driven testing plan.
  • To validate the effectiveness of QALT in predicting long-term MEMS performance.

Main Methods:

  • Implementation of a Quantitative Accelerated Life Testing (QALT) procedure.
  • Application-driven testing incorporating combined thermal (high temperature) and mechanical stress.
  • Utilized vibration (fixed frequency) and tilting as mechanical stress variants.
  • Employed custom-built equipment for simultaneous high-temperature and tilting tests.

Main Results:

  • The studied MEMS accelerometers demonstrated excellent reliability.
  • Failure rate in the "worst case" scenario was determined to be less than 10^-7 h^-1.
  • The application-driven QALT approach successfully identified high device reliability.

Conclusions:

  • MEMS accelerometers exhibit exceptional reliability suitable for demanding applications.
  • QALT is an effective methodology for quantifying and verifying MEMS device reliability.
  • The developed testing procedure and equipment are valuable for future MEMS reliability studies.