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Three Cavity Tunable MEMS Fabry Perot Interferometer.

Avinash Parashar1, Ankur Shah2, Muthukumaran Packirisamy2

  • 1Department of Mechanical and Industrial Engineering, EV 13-310, Concordia University, 1515, St. Catherine West, Montreal, Quebec, Canada H3G 2W1. parasharavinash@yahoo.com.

Sensors (Basel, Switzerland)
|September 15, 2017
PubMed
Summary
This summary is machine-generated.

This study introduces a tunable micro electro-mechanical systems (MEMS) Fabry-Perot Interferometer (FPI) for infrared spectroscopy. The proposed MEMS FPI offers precise spectral tuning for advanced optical applications.

Keywords:
Fabry Perot InterferometerFull width Half MaximumIR SpectroscopyMEMS

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Area of Science:

  • Optics and Photonics
  • Micro-electro-mechanical Systems (MEMS)

Background:

  • Fabry-Perot Interferometers (FPIs) are crucial optical components for spectral analysis.
  • Developing tunable FPIs with micro-scale precision is essential for compact spectroscopic devices.

Purpose of the Study:

  • To propose a novel four-mirror tunable micro electro-mechanical systems (MEMS) Fabry-Perot Interferometer (FPI).
  • To present the mathematical model for the proposed MEMS FPI.
  • To explore spectral tuning mechanisms within the infrared spectrum.

Main Methods:

  • Development of a four-mirror MEMS FPI concept.
  • Mathematical modeling of the FPI's optical and mechanical behavior.
  • Simulation and analysis of two distinct mirror deflection tuning strategies.

Main Results:

  • The proposed MEMS FPI operates within the infrared spectrum (2400-4018 nm).
  • Fine spectral tuning is achievable by deflecting the middle mirrors, altering cavity lengths.
  • Two tuning cases demonstrate effective FPI spectral adjustment.

Conclusions:

  • The presented MEMS FPI concept offers a viable solution for tunable infrared spectroscopy.
  • The mathematical model provides a foundation for designing and optimizing MEMS FPIs.
  • Deflection-based tuning mechanisms are effective for achieving desired spectral ranges.