Material Viscoelasticity-Induced Drift of Micro-Accelerometers.

Wu Zhou1, Peng Peng2, Huijun Yu3

  • 1School of Mechatronics Engineering, University of Electronic Technology and Science of China, Chengdu 611731, China. zhouwu916@uestc.edu.cn.

Summary

This study reveals that the viscoelastic properties of polymer adhesives cause micro-accelerometer drift over time. Higher temperatures exacerbate this drift, impacting micro-device reliability.

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