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Updated: Feb 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Compact surface plasmon holographic microscopy for near-field film mapping
Abstract:
We develop a compact objective-coupling surface plasmon holographic microscopy with a common-path configuration by introducing a Wollaston prism. Through off-axis hologram recording and numerical reconstruction, amplitude- and phase-contrast surface plasmon resonance (SPR) images can be obtained simultaneously. Based on the four-layer SPR model, the thin film thickness distribution in near field can be mapped unambiguously using a novel demodulation method without a priori knowledge. The technique demonstrates nondestructive and full-field measurement capabilities with sub-nanometer resolution theoretically. Furthermore, owing to the high temporal stability, the recommended system shows great potential for dynamic measurement of near-field tiny refractive index or thickness variation in fields such as chemistry and biomedicine, etc.

