Silicon nanobeam cavity for ultra-localized light-matter interaction

In this work, we theoretically and experimentally demonstrate an unusual air mode silicon nanobeam cavity design with dielectric mirrors. This design combines an extremely strong localization of light-matter interaction in the cavity center and a reduced sensitivity of the resonator wavelength to temperature or top cladding material refractive index variations. The proposed approach allows accurate control of the resonator cavity quality factor combined with flexible choice of the cavity effective mode volume. Q-factors higher than 50,000 have been determined for such cavities and mode volumes smaller than (λ/n)³ were achieved in the investigated configurations. Such a cavity design provides a robust approach to study the hybrid integration of various active materials in the silicon platform, including carbon nanotubes, III-V nanowires, graphene, etc., for light emission, modulation, or detection.