Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced...

A computationally efficient algorithm based on the reduced Rayleigh equation, combined with an optimization scheme, is used to accurately retrieve the morphological parameters of a two-dimensional plasmonic photonic crystal from angle-resolved spectroscopic Mueller matrix ellipsometric measurements. The numerical method is successfully tested against experimental data and gives morphological parameters consistent with SEM and AFM measurements.