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In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
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Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition

S Flege1, R Hatada1, A Derepa1

  • 1Department of Materials Science, Technische Universität Darmstadt, 64287 Darmstadt, Germany.

The Review of Scientific Instruments
|October 2, 2017
PubMed

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