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Pulsed sputtering epitaxial growth of m-plane InGaN lattice-matched to ZnO

Atsushi Kobayashi1, Jitsuo Ohta1,2, Hiroshi Fujioka3,4

  • 1Institute of Industrial Science, The University of Tokyo, Tokyo, 153-8505, Japan.

Scientific Reports
|October 11, 2017
PubMed

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