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Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

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MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications.

Sanathanan S Muttikulangara¹, Maciej Baranski², Shakil Rehman³

¹School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore. sanathan001@e.ntu.edu.sg.

Sensors (Basel, Switzerland)

|October 18, 2017

Summary

This summary is machine-generated.

We developed a silicon pitch tunable diffraction grating (PTG) for spaceborne imaging spectrometers. This tunable grating offers significant resolving power and electrostatic actuation for precise pitch adjustment.

Keywords:

microelectromechanical devices optical components tunable diffraction grating

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Published on: July 18, 2015

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Published on: February 4, 2018

Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures

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Published on: November 21, 2019

Area of Science:

Optics and Photonics
Microelectromechanical Systems (MEMS)

Background:

Diffraction gratings are essential optical components in spectroscopy, metrology, and lasers.
Microelectromechanical system (MEMS) fabrication offers mature techniques for creating gratings, including tunable designs with actuation.

Purpose of the Study:

To design, model, fabricate, and test a silicon-based pitch tunable diffraction grating (PTG).
To evaluate the PTG's suitability for spaceborne imaging spectrometers, particularly in picosatellites.

Main Methods:

Analytical modeling using a mass-spring system.
Fabrication of a silicon-based PTG.
Electrostatic actuation for tuning.
Vibration testing for spaceborne feasibility.

Main Results:

The PTG achieved an effective fill factor of 52% and a resolving power of 84.
Electrostatic actuation enabled a displacement of 2.7 μm at 40 V.
Vibration testing confirmed the structure's feasibility for spaceborne applications.

Conclusions:

The developed silicon PTG demonstrates promising performance for spaceborne imaging spectrometers.
The device's tunability and robustness make it a viable candidate for picosatellite instruments.