Electrically tunable two-dimensional metasurfaces at near-infrared wavelengths

A novel, electrically tunable metasurface comprising a periodic array of disk-shaped silicon resonators is proposed. The dielectric resonators can be individually manipulated by applying external bias, inducing the complex permittivity modulation of indium tin oxide (ITO) embedded in the middle of the silicon nanodisks. Simulation data shows a reflectance shift from 61% to 8% at λ = 1111nm and a phase shift of 272.9° at λ = 1127nm with an applied voltage in the range of -4 ~4V. In addition, by simply adjusting the resonator geometry, any operating wavelength from 850nm to 1150nm can be achieved with the metasurface.