Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry

We developed a versatile method for three-dimensional shape measurement where a specific particle can be selected on the substrate and its cross-sectional shape and size can be measured. A non-contact fast measurement is possible for the particle in the resonance domain. We applied rigorous coupled-wave analysis to the particle and calculated the diffraction patterns, comparing the patterns with the experimental results to obtain the size and shape. The shape and position of the focusing spot on the scattering particle was controlled precisely. With this method, the category of the analyzable object is extended to more shapes, such as rectangles and triangles, in addition to a conventional ellipsoid.