Cavity-based aluminum nanohole arrays with tunable infrared resonances

This work details the successful computational design, fabrication, and characterization of a cavity-based aluminum nanohole array. The designs incorporate arrays of aluminum nanoholes that are patterned on a dielectric-coated (SiO₂ or ZnSe) aluminum base mirror plane. This architecture provided a means of exploring the coupling of the localized resonances, exhibited by the aluminum nanohole array, with the cavity resonance that is generated within the dielectric spacer layer, which resides between the base plane mirror and the nanohole array. Rigorous coupled wave analysis (RCWA) was first used to computationally design the structures. Next, a range of lithographic techniques, including photolithography, E-beam lithography, and nanosphere lithography, were used to fabricate the structures. Finally, infrared spectroscopy and scanning electron microscopy (SEM) were used to characterize the spectral and structural properties of the multilayered devices, respectively. The overall goal of this study was to demonstrate our ability to design and fabricate aluminum-based structures with tunable resonances throughout the infrared region, i.e. from the short-wave through longwave infrared regions of the electromagnetic spectrum (1.5 -12 µm).