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Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
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Micromirrors with controlled amplitude and phase.

Julien Lumeau, Cihan Koc, Thomas Begou

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    |October 20, 2017
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    Summary

    This study details the creation of tiny circular mirrors, measuring 50 to 150 micrometers, with precise control over their movement and wave patterns. The research covers their design, production, and testing.

    Area of Science:

    • Microfabrication and MEMS (Micro-Electro-Mechanical Systems)
    • Optics and Photonics
    • Materials Science

    Background:

    • Micromirrors are essential components in various optical systems, including displays and telecommunications.
    • Precise control over micromirror amplitude and phase is crucial for advanced optical functionalities.
    • Existing fabrication methods may face limitations in achieving high precision and controlled performance.

    Purpose of the Study:

    • To present a comprehensive fabrication process for circular micromirrors.
    • To demonstrate controlled amplitude and phase characteristics of the fabricated micromirrors.
    • To provide detailed methods for the design, manufacturing, and characterization of these micro-optical devices.

    Main Methods:

    • Fabrication of circular micromirrors with diameters ranging from 50 to 150 micrometers.

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  • Implementation of a design methodology focused on achieving controlled motion.
  • Development and application of manufacturing techniques for micro-scale devices.
  • Characterization of micromirror performance, including amplitude and phase response.

    • Main Results:

    • Successfully fabricated circular micromirrors within the specified size range (50-150 μm).
    • Demonstrated controlled amplitude and phase capabilities of the manufactured micromirrors.
    • Validated the effectiveness of the presented design, manufacturing, and characterization methods.

    Conclusions:

    • The described fabrication approach enables the production of high-performance circular micromirrors.
    • Controlled amplitude and phase are achievable with the presented microfabrication techniques.
    • This work contributes to the advancement of micro-optical components for sophisticated applications.