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Updated: Feb 20, 2026

Thermal Measurement Techniques in Analytical Microfluidic Devices
Published on: June 3, 2015
Integrated FP/RFBG sensor with a micro-channel for dual-parameter measurement under high temperature
This study presents a novel sensor combining a micro Fabry-Perot cavity and a regenerated fiber Bragg grating for simultaneous high-temperature sensing of temperature, strain, and gas pressure.
Area of Science:
- Optoelectronics
- Fiber Optics Sensing
- High-Temperature Instrumentation
Background:
- Traditional sensors face limitations in harsh, high-temperature environments.
- Accurate simultaneous measurement of multiple parameters like temperature, strain, and gas pressure is challenging.
- Integrated optical sensors offer potential for robust, multi-functional sensing.
Purpose of the Study:
- To develop and demonstrate an integrated sensor for simultaneous dual-parameter measurement.
- To achieve high sensitivity and accuracy for temperature, strain, and gas pressure sensing.
- To operate effectively under extreme high-temperature conditions (up to 600°C).
Main Methods:
- Fabrication of a micro Fabry-Perot (MFP) cavity on a regenerated fiber Bragg grating (RFBG) using micro-machining.
- Inscribing a fiber Bragg grating (FBG) and regenerating it to enhance strain sensitivity.
- Integrating a micro-channel on the MFP to significantly boost gas pressure sensitivity.
Main Results:
- The regenerated FBG demonstrated over three times enhanced strain sensitivity.
- The micro-channel integration improved MFP gas pressure sensitivity by nearly 100 times.
- The sensor successfully performed simultaneous measurements of high temperature and strain, and high temperature and gas pressure.
Conclusions:
- The integrated MFP-RFBG sensor offers a robust solution for dual-parameter sensing in high-temperature environments.
- The distinct sensitivities of MFP and RFBG enable selective measurement of different parameter combinations.
- This technology has potential applications in industrial process monitoring and harsh environment instrumentation.
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