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Easy and Accurate Mechano-profiling on Micropost Arrays

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Microsphere-assisted phase-shifting profilometry.

Stephane Perrin, Audrey Leong-Hoï, Sylvain Lecler

|October 20, 2017

Summary

This summary is machine-generated.

This study combines superresolution microsphere imaging with low-coherence microscopy. The technique significantly enhances lateral resolution for detailed nanostructure surface profilometry.

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Area of Science:

Optical microscopy
Nanotechnology
Metrology

Background:

Superresolution imaging techniques are crucial for visualizing nanoscale features.
Low-coherence interferometry offers non-contact surface profiling capabilities.
Combining these methods can overcome limitations in lateral resolution and imaging depth.

Purpose of the Study:

To investigate the performance of a superresolution microsphere-assisted 2D imaging technique integrated with low-coherence phase-shifting interference microscopy.
To analyze the impact of geometrical and optical parameters on imaging magnification and lateral resolution through numerical simulations.
To experimentally validate the simulated performance using reference gratings and nanostructures.

Main Methods:

Numerical simulations were performed to evaluate imaging parameters like magnification and lateral resolution.
Experimental validation utilized a Linnik interference configuration for measurements.
The technique was applied to analyze reference gratings and nanostructures for surface profilometry.

Main Results:

Simulations provided insights into the relationship between geometrical/optical parameters and imaging performance.
Experimental measurements confirmed the simulated findings on reference gratings.
An improvement of 4.7x in lateral resolution was achieved in air for nanostructure analysis.

Conclusions:

The combined superresolution microsphere-assisted imaging and low-coherence interferometry technique offers enhanced lateral resolution.
This approach enables more isotropic nanometric resolution for full-field surface profilometry in the far field.
The study demonstrates a practical method for high-resolution surface characterization of nanostructures.