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    A new snapshot phase-shifting interference microscope (SPSIM) reduces environmental errors in surface roughness measurement. A developed fringe-print-through (FPT) error correction algorithm enhances measurement accuracy across various conditions.

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    Area of Science:

    • Optical Metrology
    • Surface Characterization
    • Microscopy

    Background:

    • Snapshot phase-shifting interference microscopy (SPSIM) is utilized for surface roughness measurement.
    • Phase-shifting interferometry (PSI) is prone to fringe-print-through (FPT) errors, impacting measurement accuracy.
    • Environmental factors can exacerbate FPT errors in SPSIM.

    Purpose of the Study:

    • To investigate the sources of fringe-print-through (FPT) error in snapshot phase-shifting interference microscopy (SPSIM).
    • To develop and validate a novel algorithm for correcting FPT errors in SPSIM.
    • To improve the accuracy of surface roughness measurements obtained via SPSIM.

    Main Methods:

    • Analysis of error sources contributing to FPT in SPSIM.
    • Development of a generalized FPT error correction algorithm adaptable to varying intensity distributions.
    • Verification through optical simulations and experimental measurements.

    Main Results:

    • Identification of key factors causing FPT errors in SPSIM.
    • A robust FPT error correction algorithm was successfully developed.
    • The algorithm demonstrated effectiveness under diverse intensity distribution scenarios.

    Conclusions:

    • The developed FPT error correction algorithm significantly enhances the accuracy of surface roughness measurements using SPSIM.
    • The algorithm is versatile and applicable to different intensity distribution conditions.
    • This work provides a viable solution for mitigating FPT errors in optical metrology.