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Ultra Thin Poly-Si Nanosheet Junctionless Field-Effect Transistor with Nickel Silicide Contact

Yu-Ru Lin1, Wan-Ting Tsai2, Yung-Chun Wu3

  • 1Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan. flywing79222@gmail.com.

Materials (Basel, Switzerland)
|November 8, 2017
PubMed

Keywords:
junctionless field-effect transistornickel silicideultra thin body

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