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Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven
Xinran Tan1, Fan Zhu2, Chao Wang3
1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. tanxr@hit.edu.cn.
Sensors (Basel, Switzerland)
|November 22, 2017
Summary
This study introduces a two-dimensional micro-/nanoradian angle generator (2D-MNAG) with exceptional precision. It achieves 10 nrad resolution and 120 nrad repeatability, crucial for advanced micro-angle applications.
Area of Science:
- Precision Engineering
- Metrology
- Nanotechnology
Background:
- Accurate micro-angle generation is critical for various scientific and industrial applications.
- Existing angle generators often lack the required resolution and repeatability over large angular ranges.
Purpose of the Study:
- To develop and characterize a novel two-dimensional micro-/nanoradian angle generator (2D-MNAG).
- To achieve high angular displacement resolution and repeatability for precise micro-angle measurements.
Main Methods:
- Utilizing a piezo-driven flexure hinge for two-dimensional deflections.
- Employing three capacitive sensors for output angle monitoring and feedback control.
- Analyzing and compensating for principal errors in capacitive sensors.
Main Results:
- Achieved a high angle output resolution of 10 nrad (0.002 arcsec).
- Demonstrated positioning repeatability of 120 nrad (0.024 arcsec).
- Operated over a large angular range of ±4363 μrad (±900 arcsec).
Conclusions:
- The developed 2D-MNAG offers unprecedented precision in micro-angle generation.
- Error compensation strategies significantly enhance the performance of the angle generator.
- Further improvements are possible through Monte Carlo simulations of error components.
