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Updated: Feb 17, 2026

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
Stateful characterization of resistive switching TiO2 with electron beam induced currents
Brian D Hoskins1,2, Gina C Adam3,4, Evgheni Strelcov5,6
1Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA. brian.hoskins@nist.gov.
Electron beam-induced current measurements offer a powerful new method for studying resistive switching in titanium dioxide (TiO2) devices, crucial for artificial synapses in neuromorphic computing.
Area of Science:
- Materials Science
- Nanotechnology
- Solid-State Electronics
Background:
- Metal oxide resistive switches are key components for artificial synapses in neuromorphic computing.
- Standardized methods for studying these devices are lacking.
- Titanium dioxide (TiO2) is a promising material for resistive switching applications.
Purpose of the Study:
- To establish electron beam-induced current (EBIC) measurements as a robust tool for analyzing local resistive switching in TiO2 devices.
- To correlate EBIC data with device morphology and switching state.
- To elucidate the mechanisms behind filament formation and scaling in resistive switches.
Main Methods:
- Utilizing electron beam-induced current (EBIC) microscopy to probe resistive switching.
- Performing beam energy-dependent EBIC measurements.
- Employing Monte Carlo simulations to model electron energy absorption in device layers.
- Analyzing symmetric device structures to observe polarization domains.
Main Results:
- EBIC effectively monitors the development of local resistive switching in TiO2 devices.
- Comparing EBIC with simulations allows deconstruction of filament image formation origins.
- Insights into resistive switching scaling and current leakage regions around filaments were gained.
- Propagating polarization domains were observed in symmetric device structures.
Conclusions:
- EBIC is a powerful technique for characterizing resistive switching in metal oxide devices.
- Understanding filament formation and scaling is crucial for advancing neuromorphic computing hardware.
- Further investigation into polarization phenomena could enhance device performance.
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