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Modified surface testing method for large convex aspheric surfaces based on diffraction optics.

Haidong Zhang, Xiaokun Wang, Donglin Xue

|December 8, 2017

Summary

This summary is machine-generated.

A new method uses a small computer-generated hologram to measure large convex aspheric optics accurately. This advanced optical metrology technique achieves sub-6nm accuracy, overcoming limitations of conventional testing methods.

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Area of Science:

Optics and Optical Engineering
Metrology
Advanced Manufacturing

Background:

Large convex aspheric optical elements are crucial in advanced optical systems.
Conventional metrology methods struggle to meet the demands for testing increasingly large aspheric surfaces.

Purpose of the Study:

To propose and demonstrate a modified metrology method for accurately measuring large convex aspheric optical elements.
To address the limitations of traditional testing techniques for large-scale optics.

Main Methods:

Utilized a computer-generated hologram (CGH) with a feasible illumination lens.
Designed and analyzed two example systems to showcase the method's applicability.
Evaluated the sensitivity and accuracy of the proposed configuration.

Main Results:

The proposed method demonstrated applicability for measuring large convex aspheric surfaces.
Achieved an accuracy better than 6 nm with careful alignment and calibration.
Sensitivity analysis confirmed the reliability of the metrology configuration.

Conclusions:

The modified metrology approach using a CGH is effective for large convex aspheric surface measurement.
This technique offers a viable solution for advanced optical metrology challenges.
The method provides high accuracy suitable for demanding optical applications.