Modeling the sensitivity dependence of silicon-photonics-based ultrasound detectors

With recent advances in optical technology, interferometric sensing has grown into a highly versatile approach for ultrasound detection, with many interferometric detectors relying on optical waveguides to achieve high levels of sensitivity and miniaturization. In this Letter, we establish a practical model for assessing the sensitivity of silicon-photonics waveguides to acoustic waves. The analysis is performed for different polarizations, waveguide dimensions, and acoustic wave types. Our model was validated experimentally in the acoustic frequency band of 1-13 MHz by measuring the sensitivities of the two polarization modes in a silicon strip waveguide. Both the experimental results and theoretical prediction show that the transverse-magnetic polarization achieves a higher sensitivity and suppression of surface acoustic waves compared to the transverse-electric polarization for the geometries studied.