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Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction.

Dongmei Guo, Liheng Shi, Yanguang Yu

|December 17, 2017

Summary

This summary is machine-generated.

This study presents an improved laser self-mixing grating interferometer (SMGI) for precise micro-displacement measurements. The novel design achieves high sensitivity and nanometer accuracy, offering a robust solution for compact measurement systems.

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Last Updated: Feb 16, 2026

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Area of Science:

Optics and Photonics
Metrology and Measurement Science

Background:

Laser interferometry is crucial for high-precision measurements.
Traditional self-mixing grating interferometers (SMGI) can be affected by zero-order diffraction feedback.
Enhancing optical subdivision is key for finer displacement resolution.

Purpose of the Study:

To develop an improved laser self-mixing grating interferometer (SMGI) with enhanced precision and robustness.
To mitigate disturbances from zero-order diffraction beams in SMGI systems.
To achieve higher optical subdivision for micro-displacement measurements.

Main Methods:

Implementation of an auto-collimation design within the SMGI.
Integration of multiple-diffraction techniques into the SMGI.
Theoretical analysis and experimental validation of the proposed system.

Main Results:

The auto-collimation design effectively eliminates zero-order diffraction beam feedback.
The multi-diffraction SMGI achieved higher optical subdivision.
The system demonstrated high sensitivity and low measurement uncertainty for displacement measurement.
Micro-displacements were reconstructed with accuracy in the nanometer range.

Conclusions:

The improved SMGI offers a robust and high-precision measurement solution.
The compact system configuration is suitable for various micro-displacement applications.
The auto-collimation and multi-diffraction approach enhances interferometric measurement capabilities.