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Updated: Feb 16, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Che Zhao1, Chao Peng2, Weiwei Hu3
1State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Electronics Engineering and Computer Science, Peking University, Beijing, 100871, China.
We developed a scalable silicon optical phased array (OPA) using electro-optical (EO) pixels. This modular design achieves a narrow main lobe width of 0.04° and a wide field of view, demonstrating fabrication feasibility.
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