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Related Experiment Video

Updated: Feb 16, 2026

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High-Speed Focus Inspection System Using a Position-Sensitive Detector.

Binh Xuan Cao1,2, Phuong Le Hoang3, Sanghoon Ahn4

  • 1Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. xuanbinh.cao@gmail.com.

Sensors (Basel, Switzerland)
|January 3, 2018
PubMed
Summary

This study introduces a new focus detection technique for high-intensity laser manufacturing. The system offers rapid response and high precision, improving upon existing low-resolution methods for industrial applications.

Keywords:
CCD camerafocal position detectionlaser micromachiningposition-sensitive detectorsingle-slit masks

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Area of Science:

  • Optical Engineering
  • Industrial Manufacturing

Background:

  • Precise focus detection is critical for laser-based manufacturing processes.
  • Current focus detection methods suffer from low resolution, limiting their effectiveness.

Purpose of the Study:

  • To develop a rapid-response, high-precision, and high-resolution focus inspection system.
  • To overcome the limitations of existing low-resolution focus detection techniques.

Main Methods:

  • Utilizes geometrical optics and advanced optical instruments.
  • Incorporates an ultrafast interface position detector and a single-slit mask for precise focus signaling.
  • Analyzes reflected images on an image sensor.

Main Results:

  • Achieves high-resolution focus detection.
  • Maintains high image quality even with target surface shifts along the optical axis.
  • Demonstrates a simple and inexpensive system design.

Conclusions:

  • The proposed system provides a practical solution for industrial focus inspection.
  • Suitable for manufacturing sophisticated structures like microcircuits and microchips.
  • Enhances precision and efficiency in laser manufacturing processes.