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Updated: Feb 16, 2026

One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes

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Fabrication of nanopores and nanoslits with feature sizes down to 5 nm by wet etching method

Qi Chen1, Yifan Wang2, Tao Deng2

  • 1Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China.

Nanotechnology
|January 5, 2018
PubMed

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