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Updated: Feb 15, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
Nano-opto-electro-mechanical systems
Leonardo Midolo1, Albert Schliesser2, Andrea Fiore3
1Niels Bohr Institute, University of Copenhagen, Copenhagen, Denmark. midolo@nbi.ku.dk.
Abstract:
A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from the field of optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, in both the classical and the quantum domains. This Perspective discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation and suggests potential avenues for further developments in this field.
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