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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
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Localized Electrothermal Annealing with Nanowatt Power for a Silicon Nanowire Field-Effect Transistor

Jun-Young Park1, Byung-Hyun Lee1,2, Geon-Beom Lee1

  • 1School of Electrical Engineering, KAIST , 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.

ACS Applied Materials & Interfaces
|January 12, 2018
PubMed

Keywords:
Joule heatannealingdopant activationdopant controlheat treatmentnanowirep-i-n diodetunneling field-effect transistor

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