Turning a normal microscope into a super-resolution instrument using a scanning microlens array

We report dielectric microsphere array-based optical super-resolution microscopy. A dielectric microsphere that is placed on a sample is known to generate a virtual image with resolution better than the optical diffraction limit. However, a limitation of such type of super-resolution microscopy is the restricted field-of-view, essentially limited to the central area of the microsphere-generated image. We overcame this limitation by scanning a micro-fabricated array of ordered microspheres over the sample using a customized algorithm that moved step-by-step a motorized stage, meanwhile the microscope-mounted camera was taking pictures at every step. Finally, we stitched together the extracted central parts of the virtual images that showed super-resolution into a mosaic image. We demonstrated 130 nm lateral resolution (~λ/4) and 5 × 10⁵ µm² scanned surface area using a two by one array of barium titanate glass microspheres in oil-immersion environment. Our findings may serve as a basis for widespread applications of affordable optical super-resolution microscopy.