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Updated: Feb 15, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Atomic-resolution transmission electron microscopy of electron beam-sensitive crystalline materials
Daliang Zhang1, Yihan Zhu2, Lingmei Liu2
1King Abdullah University of Science and Technology (KAUST), Imaging and Characterization Core Lab, Thuwal 23955-6900, Saudi Arabia. daliang.zhang@kaust.edu.sa kun.li@kaust.edu.sa yu.han@kaust.edu.sa.
We developed new methods for high-resolution transmission electron microscopy (TEM) imaging of delicate materials. This technique successfully captured atomic details in electron beam-sensitive metal-organic frameworks and perovskites.
Area of Science:
- Materials Science
- Electron Microscopy
- Nanotechnology
Background:
- Imaging electron beam-sensitive materials with transmission electron microscopy (TEM) presents significant challenges.
- These challenges include low beam doses, rapid crystal zone axis identification, precise image alignment, and accurate defocus determination.
Purpose of the Study:
- To develop and implement a suite of methods for high-resolution TEM imaging of electron beam-sensitive materials.
- To achieve atomic-resolution imaging of metal-organic frameworks (MOFs) and other sensitive materials.
Main Methods:
- Development of specialized techniques for low-dose, high-resolution TEM imaging.
- Implementation of methods for rapid zone axis finding, image alignment, and defocus measurement.
- Application of these methods to various electron beam-sensitive samples.
Main Results:
- Successfully acquired atomic-resolution TEM images of several metal-organic frameworks (MOFs).
- Identified individual metal atomic columns, surface terminations, and benzene rings within the MOF structures.
- Extended the application of the methods to hybrid perovskite materials (CH3NH3PbBr3).
Conclusions:
- The developed methods overcome key challenges in TEM imaging of beam-sensitive materials.
- Atomic-resolution imaging is achievable for delicate materials like MOFs and perovskites.
- This advancement enables detailed structural analysis of sensitive nanomaterials.
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