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Alkali-resistant low-temperature atomic-layer-deposited oxides for optical fiber sensor overlays
K Kosiel1, M Dominik2, I Ściślewska2
1Instytut Technologii Elektronowej, Al. Lotników 32/46, 02-668 Warsaw, Poland.
Nanotechnology
|January 23, 2018
Summary
This study investigated hafnium, tantalum, and zirconium oxides as protective coatings for optical fiber sensors. These metallic oxides demonstrate excellent resistance in alkaline environments, making them suitable for advanced sensor applications.
Area of Science:
- Materials Science
- Nanotechnology
- Sensor Technology
Background:
- Optical fiber sensors are crucial for various applications but susceptible to harsh environments.
- Developing robust coatings is essential to enhance sensor durability and functionality.
- Alkaline environments pose a significant challenge to the longevity of optical fiber sensors.
Purpose of the Study:
- To evaluate the properties of HfOx, TaxOy, and ZrxOy thin films deposited by atomic layer deposition (ALD).
- To assess their suitability as protective overlays for optical fiber sensors in alkaline conditions.
- To investigate the structural, optical, and mechanical characteristics of these metallic oxide coatings.
Main Methods:
- Atomic Layer Deposition (ALD) at 100 °C for HfOx, TaxOy, and ZrxOy.
- Characterization using X-ray diffractometry, atomic force microscopy, and ellipsometry.
- Mechanical testing including nanohardness, Young's modulus, and scratch resistance.
- Evaluation of surface properties like wettability and alkali resistance (pH 14).
Main Results:
- Amorphous oxide films with smooth surfaces (RMS roughness ~0.5 nm) were obtained.
- HfOx and TaxOy exhibited superior tribological properties compared to ZrxOy.
- The oxide layers showed high refractive indices (n=2.00-2.10) and excellent alkali resistance.
- TaOx overlay on an optical fiber grating sensor ensured long-term stability in a pH 9 alkaline environment.
Conclusions:
- HfOx, TaxOy, and ZrxOy are promising materials for protective coatings in optical fiber sensors.
- ALD-deposited metallic oxides offer enhanced durability and reusability for sensors in alkaline media.
- These findings pave the way for developing regenerable optical fiber biosensors with improved performance.
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