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Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer.
Wu Zhou1, Jiangbo He2, Huijun Yu3
1School of Mechanical and Electrical Engineering, University of Electronic Technology and Science of China, Chengdu 611731, China. zhouwu916@uestc.edu.cn.
Materials (Basel, Switzerland)
|January 25, 2018
Summary
Glass polarization causes turn-on drift in micro-accelerometers. Adding a shielding layer significantly reduced this drift by 73%, improving micro-device stability.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Solid-State Physics
Background:
- Closed-loop micro-accelerometers are susceptible to turn-on drift.
- The silicon-on-glass (SOG) structure is a common architecture for micro-devices.
Purpose of the Study:
- To investigate the primary cause of the turn-on drift phenomenon in closed-loop micro-accelerometers.
- To propose a method for mitigating this drift in SOG micro-devices.
Main Methods:
- Introduced glass polarization effects as the cause of drift.
- Conducted experiments to indirectly test the drift phenomenon.
- Applied a shielding layer to the glass substrate to counteract electrostatic forces.
Main Results:
- Identified DC bias voltage-induced polarization in the glass substrate as the drift cause.
- Demonstrated that a shielding layer effectively reduced drift by prohibiting electrostatic forces.
- Observed a 73% average decrease in drift magnitude (from 3.69 mV to 0.99 mV).
Conclusions:
- Glass polarization is the main cause of turn-on drift in SOG micro-accelerometers.
- Shielding layers offer a viable solution to enhance micro-device stability.
- Findings provide guidelines for improving the performance of silicon-on-glass micro-devices.
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