Ultrathin silicon oxynitride layer on GaN for dangling-bond-free GaN/insulator interface

Kengo Nishio1, Tomoe Yayama2, Takehide Miyazaki2

  • 1National Institute of Advanced Industrial Science and Technology (AIST), Central 2, Umezono 1-1-1, Tsukuba, Ibaraki, 305-8568, Japan. k-nishio@aist.go.jp.

Scientific Reports
|January 25, 2018
PubMed
Summary

Researchers predict a novel silicon oxynitride buffer layer for creating a dangling-bond-free Gallium Nitride (GaN) and insulator interface. This breakthrough offers a stable, tunable solution for advanced electronic materials.

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