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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Deformation Measurement

    Background:

    • Spatial phase-shift technique is established for out-of-plane measurements.
    • Application to in-plane sensitive systems remains unreported.
    • Dual-beam speckle interferometry is sensitive to in-plane deformations.

    Purpose of the Study:

    • To present a novel optical configuration for spatial phase-shift in dual-beam speckle interferometry.
    • To enable application of spatial phase-shift technique to pure in-plane sensitive systems.
    • To demonstrate the capability of the new technique for in-plane deformation measurement.

    Main Methods:

    • Utilizes a dual-beam in-plane electronic speckle pattern interferometry setup.
    • Employs individual aperture shears and a low-coherence source to avoid object plane interference.
    • Introduces spatial phase shift via aperture angle mapping and extracts phase using Fourier transform.

    Main Results:

    • Successfully applies spatial phase-shift technique to pure in-plane sensitive dual-beam speckle interferometry.
    • Demonstrates direct extraction of in-plane deformation phase from speckle patterns.
    • Validates the novel spatial phase-shift dual-beam speckle interferometry (SPS-DBSP) through theoretical analysis and experiments.

    Conclusions:

    • The developed spatial phase-shift dual-beam speckle interferometry (SPS-DBSP) is a viable technique for in-plane deformation measurement.
    • The novel optical configuration effectively overcomes previous limitations.
    • The Fourier transform method allows direct phase extraction, simplifying the measurement process.