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Image feature delocalization in defocused probe electron ptychography.

S Cao1, A M Maiden1, J M Rodenburg1

  • 1Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield S1 3JD, United Kingdom.

Ultramicroscopy
|February 8, 2018
PubMed
Summary
This summary is machine-generated.

Electron ptychography can transform scanning electron microscopes (SEM) into transmission electron microscopes (TEM). This study investigates and mitigates delocalization effects in SEM-based electron ptychography for improved atomic resolution imaging.

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Electron ptychography offers a pathway to upgrade conventional scanning electron microscopes (SEM) to transmission electron microscopes (TEM).
  • Previous work demonstrated a fivefold resolution improvement using electron ptychography but noted atomic fringe delocalization issues.

Purpose of the Study:

  • To investigate the factors causing delocalization in SEM-based electron ptychography when using a defocused probe.
  • To develop and test mitigation strategies for improving reconstruction quality.

Main Methods:

  • Analysis of delocalization factors including source incoherence, detector faults, data truncation, and illumination step size calibration.
  • Application of mitigation strategies such as modal decomposition of beam incoherence.
  • Reprocessing of existing SEM ptychography data with refined methods.

Main Results:

  • Identified source incoherence, detector issues, data truncation, and calibration errors as key contributors to delocalization.
  • Demonstrated that modal decomposition effectively addresses beam incoherence.
  • Reprocessed data showed significant improvements in reconstruction quality.

Conclusions:

  • Understanding and addressing specific factors like incoherence and calibration errors are crucial for high-resolution imaging with electron ptychography.
  • The developed mitigation strategies substantially enhance the fidelity of reconstructions in SEM-based electron ptychography.
  • Electron ptychography holds significant potential for advancing nanoscale imaging capabilities in conventional SEMs.