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Updated: Feb 14, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Sum-Frequency Generation Vibrational Spectroscopy Investigations of Phosphonic Acids on Anodic Aluminum Oxide Films
Cornelia Reitböck1, Eric Głowacki2, David Stifter1
11 Center for Surface- and Nanoanalytics, Johannes Kepler University Linz, Linz, Austria.
Abstract:
Self-assembled monolayers of alkyl phosphonic acids on anodic aluminum oxide (AlOx) surfaces are important as dielectric layers in thin film electronic devices. Assessing the properties and quality of these monolayers on amorphous AlOx is limited to a few surface-sensitive methods. In this work, we study using nonlinear optical measurements the molecular ordering in n-alkyl phosphonic acids with various alkyl chain lengths (6 to 18 carbons) deposited on AlOx and show the influence of temperature on stability and conformational order. The results demonstrate that the octadecylphosphonic acid has fewest defects in the chain orientation. A detailed comparison of the longest and the shortest alkyl chain revealed different behavior in conformational ordering upon annealing.
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